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Course
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School of Physics
NIZ 114- Semiconductor Fabrication Processes for the Microelectronic Industry
Date: 21-23 May 2008
Fee: RM1,600.00
INTRODUCTION
An intensive short course for engineers, managers and academicians working in semiconductor devices and integrated circuit.
This intensive short course provides an introduction to wafer fabrication process. The course will cover wafer growth, oxidation lithography, etching, doping, deposition and metallization.
There will be laboratory sessions pertaining to the course contents.
COURSE CONTENTS
• Crystal Growth and Wafer Preparation
• Oxidation Process
• Lithography
• Etching
• Impurity Introduction and Redistribution
• diffusion
• ion implantation
• Film Deposition
• evaporation
• sputtering
• CVD
• epitaxy
• Interconnections and Contacts
• Laboratory Sessions
• wafer characterization/cleaning
• wet oxidation process/cleaning/etching
• lithography/doping
• Device Characterization
Course Coordinator:
Associate Professor Md. Roslan Hashim
e-mail: roslan@usm.my
tel: 04- 6533677
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